Fluid Control for Semiconductor Fabrication
Equilibar valves have a unique throat geometry with multiple parallel flow paths that has been shown to avoid cavitation issues (both pitting and noise).
Equilibar valves have a unique throat geometry with multiple parallel flow paths that has been shown to avoid cavitation issues (both pitting and noise).
Equilibar vacuum regulators maintain precision vacuum control for landfill gas extraction from municipal solid waste sites.
Equilibar vacuum regulators offer exceptionally fast response that is successful in vacuum filling operations
Equilibar vacuum regulators maintain precise vacuum control for severe chemistry conditions in API drying
Equilibar vacuum regulators can be usedfor the precision harvesting of allantoic fluid for flu vaccines.
In most vacuum holding applications, flow rate and pressure vary significantly as the number of open holes in the holding system vary.
In most vacuum holding applications, flow rate and pressure vary significantly as the number of open holes in the holding system vary.
How to use an Equilibar® back pressure valve in polymer chemistry process control
Our vacuum regulator offers exceptionally fast response that automatically compensates for fluctuations in flow rate without complex control loops.
The RSV is a highly sensitive mechanical vacuum pilot regulator designed specifically to provide closed-loop control of an Equilibar vacuum regulator (EVR).
When Equilibar’s vacuum regulator is paired with the remote sense RSV pilot regulator, the precision performance is carried into higher flow rates.
Using a direct acting vacuum regulator, such as Equilibar EVR series vacuum regulators, will control vacuum by limiting the flow .
In most vacuum holding applications, flow rate and pressure vary significantly at startup and during process disruptions. The EVR can help maintain control.
Equilibar Vacuum Regulators are especially well suited for the complex demands of glovebox pressure control and can control down to the range of 1 inH2O (2 mbar)
For these applications, a vacuum regulating valve is needed on the processes requiring a lower vacuum pressure than the vacuum supply header.
Equilibar® vacuum regulators don’t use springs, but instead utilize a 1:1 setpoint pilot pressure on their dome to provide improved precision.